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Quanta 3D FEG

FIB Active

Thermo Fisher Scientific — Quanta 3D FEG

Dual-beam FIB-SEM with Ga+ ion source for TEM sample preparation, cross-sectioning, and nanoscale patterning.

Type Dual-beam FIB-SEM
Ion source Ga+ liquid metal ion source
SEM Gun Schottky FEG
SEM Resolution < 1 nm @ 30 kV
FIB Resolution < 7 nm @ 30 kV
Voltage 0.2–30 kV (SEM), 2–30 kV (FIB)
Detectors ETD, vCD, STEM, EDS
Purchased 2008. 08