Helios 5 Hydra

FIB Active

Thermo Fisher Scientific — Helios 5 Hydra

Multi-ion species plasma FIB-SEM (Xe, Ar, O, N) with Elstar SEM column, cryo-stage, and cryo-transfer capability for air-sensitive and beam-sensitive materials.

Type Plasma FIB-SEM (PFIB)

Ion species Xe, Ar, O, N (multi-plasma)

SEM column Elstar

FIB max current 2.5 µA (PFIB)

FIB spot size 15 nm – 15 µm

Cryo-stage 2nd-gen cryo-stage

Transfer Cryo-transfer

Purchased 2025. 11