Back to Facilities
Product image: Hitachi High-Tech
Hitachi SU8600
SEM ActiveHitachi High-Tech — SU8600
Cold field-emission SEM for high-resolution surface imaging, combining low-voltage observation with flexible SE/BSE contrast to examine particles, coatings, and cross-sectional microstructures.
Type Cold field-emission SEM
Electron Gun Cold FEG
Resolution 0.6 nm @ 15 kV
Voltage 0.5–30 kV
Low-voltage Resolution 0.7 nm @ 1 kV (deceleration mode)
Magnification 20–2,000,000×
Stage 5-axis motorized
Overview
SU8600 combines a bright cold field-emission source with flexible signal detection for high-resolution surface imaging. Low-voltage observation and SE/BSE contrast help distinguish fine topography from compositional variations across particles, coatings, and polished cross sections.
Key Features
- Low-voltage imaging: resolves fine surface features while limiting the electron interaction volume.
- SE/BSE signal control: the upper detector and ExB system support complementary topographic and material contrast.
- Stable acquisition: automated electron-optical alignment supports repeatable imaging across multiple fields of view.
Applications
Particle morphology and coating coverage; pores and cracks in electrode cross sections; surface and interface features in semiconductor and catalyst materials.